They're coming up with EUV machines though the yield itself remains questionable but they'd improve with time.
China is looking to manufacture a homegrown EUV machine to compete with those of Dutch tech giant ASML – or cut such machines out of the process entirely.
thediplomat.com
You underestimate the technology behind EUV machine. Building a EUV is far more complex than even going to the moon. It's more likely Chinese will have a shot at going to the moon than building viable EUV machine. Why I say that? Read on.
The research to start building EUV machine started in late 1990's with US funding.
Although by 2010 they have made significant progress, they were still not there yet. It was then they decided they needed to bring onboard Intel, TSMC and Samsung to carry the research forward. So in 2012 all these 3 companies invested in ASML.
It’s the smallest of the three investors. The ASML funding program is now complete.
hexus.net
This gave a shot in the arm for ASML who carried on the research. In addition to that, they established 700 suppliers like Car Zeiss from Germany, Applied materials from US, Tokyo Electron from Japan. They have exclusivity contract with all these suppliers meaning these suppliers cannot supply to any present or future competitors to ASML.
TEL and ASML will provide equipment at their respective facilities in Japan and the Netherlands to accelerate development of advanced lithography technologies.
www.asml.com
After more than decade and half, EUV machine became a reality in 2016 and first EUV was shipped in 2017. By 2020, there were still only 100 EUV machines in the world. Imagine the complexity of even manufacturing a EUV that they could only produce 100 of them by 2020. They can pop out 100's of DUV machines per year whereas with EUV they can only make 12 of them a year. Now they have increased the production to 60 EUVs per year.
Thanks to the TMTPost interview with the Global Vice President and China President of ASML, Shen Bo, the Dutch semiconductor equipment manufacturer has revealed that around 1,400 of its deep ultraviolet (DUV) lithography and metrology machines are currently installed in China. The company is...
www.techpowerup.com
If the Chinese have not perfected DUV, then they have no chance in developing a EUV machine. They still order DUV machines from ASML which is not under sanctions. With regards to Chinese stealing or developing their EUV machine, this is what ASML CEO had to say
“A lot of ASML’s technology is not on blueprints,” he said. “It’s in the heads of people. And you don’t need just the blueprints; you need everything surrounding it and the entire supply chain. You have to build an alternative Zeiss etc. That is a colossal task. You’re not talking about months or years. You’re talking about a decade or more before you could replicate something like this.”
ASML is being treated as a vital infrastructure tool for the National US national security and at the same time, has become a sort of industrial espionage target for China.
economictimes.indiatimes.com